Laser-induced resonant excitation of ethylene molecules in C2H4/C2H2/O2 reactions to enhance diamond deposition
Laser-induced resonant excitation of ethylene molecules in C2H4/C2H2/O2 reactions to enhance diamond deposition
复制标题
C2H4/C2H2/O2 反应中激光诱导乙烯分子共振激发以增强金刚石沉积
DOI：
10.1063/1.2986217
复制
发表时间：
2009
期刊：
影响因子：
--
通讯作者：
Y. Lu
中科院分区：
文献类型：
--
作者：
H. Ling;J. Sun;Y. X. Han;T. Gebre;Z. Xie;M. Zhao;Y. Lu
利用二氧化碳激光对乙烯（C2H4）分子进行振动共振激发，促进乙烯、乙炔（C2H2）和氧的前体反应，促进金刚石沉积。选择C2H4分子的一种振动模式（CH2 wag模式，v7）来实现反应的共振激发。利用发射光谱法研究了激光共振激发对金刚石沉积反应的影响。在激光激发下，CH和C2的光发射增强，表明反应中产生了更多的活性物质。沉积膜的厚度和晶粒尺寸也相应增大。从CH发射光谱r支谱线的温度计算表明，增强的金刚石沉积过程涉及非热过程。
Vibrational resonant excitation of ethylene (C2H4) molecules using a carbon dioxide laser was employed to promote reactions in precursors of ethylene, acetylene (C2H2), and oxygen to enhance diamond deposition. One of the vibrational modes (CH2 wag mode, v7) of the C2H4 molecules was selected to achieve the resonant excitation in the reactions. Optical emission spectroscopy was used to study the effects of laser resonant excitation on the reactions for diamond deposition. The optical emissions of CH and C2 species were enhanced with the laser excitation, indicating that there are more active species generated in the reactions. Thicknesses and grain sizes of the deposited films were increased correspondingly. Temperature calculations from the line set in the R-branch of CH emission spectra indicated that a nonthermal process is involved in the enhanced diamond deposition.