Ozone Generation by a DC Driven Micro-Hollow Cathode Discharge in Nitrogen-Mixed Oxygen Flow

Ozone Generation by a DC Driven Micro-Hollow Cathode Discharge in Nitrogen-Mixed Oxygen Flow
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氮气混合氧气流中直流驱动微空心阴极放电产生臭氧

DOI:
10.1143/jjap.43.6381
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发表时间:
2004
影响因子:
1.5
通讯作者:
S. Ishii
S. Ishii
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
A. Yamatake;K. Yasuoka;S. Ishii

文献摘要

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研究了氮气-氧气混合气流中直流驱动微型空心阴极放电的臭氧生成特性。在纯氧条件下,臭氧浓度为13.7 g/Nm3,效率为97 g/kWh。然而,在4%和80%的n2混合氧气体中,臭氧浓度分别为8.2 g/Nm3和25 ppm臭氧。有一个阈值比能,超过这个比能,臭氧浓度显著下降。高能电子解离氮分子,产生NO和NO2,加速了高功率密度等离子体(如微空心阴极放电)中臭氧的分解。
The ozone generation characteristic of a DC driven micro-hollow cathode discharge was studied in nitrogen-mixed oxygen gas flow. An ozone concentration of 13.7 g/Nm3 was obtained at an efficiency of 97 g/kWh in pure oxygen. However, ozone concentrations of 8.2 g/Nm3 and 25 ppm ozone were obtained in gas mixtures of 4% and 80% N2-mixed oxygen gases, respectively. There was a threshold specific energy above which ozone concentration markedly decreased. High-energy electrons dissociate the nitrogen molecules and generate NO and NO2 which accelerate the ozone decomposition in high-power-density plasmas such as a micro-hollow cathode discharge.