Real-time imaging with THz fully-customized uncooled amorphous-silicon microbolometer focal plane arrays
Real-time imaging with THz fully-customized uncooled amorphous-silicon microbolometer focal plane arrays
复制标题
使用太赫兹完全定制的非制冷非晶硅微测辐射热计焦平面阵列进行实时成像
DOI：
10.1117/12.919185
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发表时间：
2012
影响因子：
4
通讯作者：
S. Barbieri
中科院分区：
文献类型：
--
作者：
F. Simoens;J. Meilhan;B. Delplanque;S. Gidon;G. Lasfargues;J. Lalanne Dera;D. Nguyen;J. Ouvrier;S. Pocas;T. Maillou;O. Cathabard;S. Barbieri
CEA-LETI正在开发用于太赫兹成像和传感的太赫兹非制冷天线耦合微测辐射热计焦平面阵列。这种探测器技术依赖于非晶硅测辐射热计技术，旨在开辟实时视频速率2D成像的道路，在制造和操作中具有潜在的低成本。320 x240像素阵列的第一个原型已经被设计用于1-3 THz传感。传感器已被制造单片以上的CMOS集成电路，同时只应用全硅标准硅工艺。我们提出了大量的表征和模拟工作的结果，以估计这些原型的灵敏度和光谱吸收。最新的实时成像与主动照明的QCL的测试，然后报告，而炸药样品被放置在一个光学设置在反射配置。
Terahertz uncooled antenna-coupled microbolometer focal plane arrays are being developed at CEA-LETI for THz imaging and sensing. This detector technology relies on amorphous silicon bolometer know-how and aims at opening the way to real-time video rate 2D imaging, with potential low cost either in fabrication and in operation. First prototypes of 320x240 pixel arrays have been designed for 1-3 THz sensing. Sensors have been fabricated monolithically above CMOS Integrated Circuits while applying only full Si standard silicon processes. We present the results of extensive work of characterization and simulations made to estimate the sensitivity and spectral absorption of these prototypes. Tests of latest real-time imaging with active illumination by QCLs are then reported while explosives samples were placed in an optical set-up in reflection configuration.