Method for Aligned Bamboolike Carbon Nanotube Growth Using RF Magnetron Sputtering
Method for Aligned Bamboolike Carbon Nanotube Growth Using RF Magnetron Sputtering
复制标题
使用射频磁控溅射定向竹状碳纳米管生长的方法
DOI：
10.1143/jjap.42.713
复制
发表时间：
2003
影响因子：
1.5
通讯作者：
K. Oura
中科院分区：
文献类型：
--
作者：
Kuei;S. Honda;T. Ikuno;K. Fujimoto;K. Tsuji;Shigeharu Ohkura;M. Katayama;T. Hirao;K. Oura
我们提出了一种使用射频磁控溅射定向竹状碳纳米管（CNT）生长的方法。据透露，可以通过在溅射系统中采用热丝来合成对齐的碳纳米管，正如在镍/硅基板上的碳纳米管所证明的那样。发现所得的碳纳米管在基底上垂直排列，高度均匀，并具有竹子状结构。在负样品偏压下的溅射沉积也获得了类似的结果，表明热灯丝的效应可归因于撞击生长前沿的碳颗粒的能量增强，这在溅射生长碳纳米管中起着至关重要的作用。
We present a method for aligned bamboolike carbon nanotube (CNT) growth using RF magnetron sputtering. It has been revealed that aligned CNTs can be synthesized by adopting a hot filament in the sputtering system, as demonstrated for CNTs on an Ni/Si substrate. The resultant CNTs were found to be aligned vertically on the substrate with uniform height and have a bamboolike structure. Similar results were obtained for sputtering deposition under a negative sample bias, indicating that the effect of the hot filament can be attributed to the energy enhancement of the carbon particles impinging on the growth front, which plays an essential role in the growth of CNTs by sputtering.