Novel Noria (Water Wheel-Like Cyclic Oligomer) Derivative as a Chemically Amplified Extreme Ultraviolet (EUV)-Resist Material
Novel Noria (Water Wheel-Like Cyclic Oligomer) Derivative as a Chemically Amplified Extreme Ultraviolet (EUV)-Resist Material
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DOI：
10.2494/photopolymer.22.73
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发表时间：
2009-01-01
影响因子：
0.8
通讯作者：
Itani, Toshiro
中科院分区：
文献类型：
--
作者：
Nishikubo, Tadatomi;Kudo, Hiroto;Itani, Toshiro
