Effects of Variability in Plasma-Induced Damage to Si Substrate on Device Performance and Its Application to Variability Assessment Methodology
Effects of Variability in Plasma-Induced Damage to Si Substrate on Device Performance and Its Application to Variability Assessment Methodology
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硅衬底等离子损伤的变异性对器件性能的影响及其在变异性评估方法中的应用
DOI：
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发表时间：
2020
期刊：
影响因子：
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通讯作者：
濱野誉，占部継一郎，江利口浩二
中科院分区：
文献类型：
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作者：
Yukari Jessica Tham;Takaaki Hashimoto;and Kaori Karasawa;Naoyuki Iwata;濱野誉，占部継一郎，江利口浩二
