Single-Step Deposition of Cerium-Substituted Yttrium Iron Garnet for Monolithic On-Chip Optical Isolation
Single-Step Deposition of Cerium-Substituted Yttrium Iron Garnet for Monolithic On-Chip Optical Isolation
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DOI：
10.1021/acsphotonics.5b00026
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发表时间：
2015-06
影响因子：
0.6
通讯作者：
Qingyang Du;T. Goto;Dong Hun Kim;Nicolas M. Aimon;Juejun Hu;C. Ross;Xueyin Sun;M. Onbaşlı
中科院分区：
文献类型：
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作者：
Qingyang Du;T. Goto;Dong Hun Kim;Nicolas M. Aimon;Juejun Hu;C. Ross;Xueyin Sun;M. Onbaşlı
光子集成电路需要磁光(MO)材料来制造非互易器件，如隔离器和环行器。最成功的MO材料是稀土取代的铁石榴石，但在没有种子层的硅上生长这些材料可能是一种挑战，这会在波导和MO包层之间引入间距损失。采用脉冲激光沉积(PLD)方法，在硅、石英和Gd3Ga5O12(GGG)等不同衬底上制备了MO Ce：YIG(Ce1Y2Fe5O12)/YIG(Y3Fe5O12)双层或三层薄膜。生长在MoCe：YIG上方的YIG种子层促进了非原位快速热退火过程中的再结晶，从而降低了热预算，简化了沉积过程。通过在绝缘体上硅谐振器上直接沉积Ce：YIG/YIG双层盖层，实现了一种单片集成光隔离器。该器件的插入损耗为7.4±1.8...
Photonic integrated circuits require magneto-optical (MO) materials for making nonreciprocal devices such as isolators and circulators. The most successful MO materials are rare-earth-substituted iron garnets, but these can be challenging to grow on silicon without a seed layer, which introduces spacing loss between the waveguide and the MO cladding. A pulsed-laser deposition (PLD) method is used for making MO Ce:YIG (Ce1Y2Fe5O12)/YIG (Y3Fe5O12) bilayer or trilayer films on different substrates, including silicon, quartz, and Gd3Ga5O12 (GGG), in which a multilayer film is deposited in one run and then annealed. A YIG seed layer grown above the MO Ce:YIG facilitates recrystallization during ex situ rapid thermal annealing, which results in a reduced thermal budget and simplified deposition process. A monolithically integrated optical isolator was demonstrated by direct deposition of a bilayer Ce:YIG/YIG capping layer onto a silicon-on-insulator resonator. The device exhibited an insertion loss of 7.4 ± 1.8...