Design and implementation of capacitive proximity sensor using microelectromechanical systems technology
Design and implementation of capacitive proximity sensor using microelectromechanical systems technology
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DOI：
10.1109/41.735332
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发表时间：
1998-12-01
影响因子：
7.7
通讯作者：
Luo, RC
中科院分区：
文献类型：
--
作者：
Chen, ZH;Luo, RC
本文提出了一种创新的接近传感器，采用微机电系统（MEMS）技术。接近传感器的工作原理是边缘电容。目标对象不需要是测量系统的一部分，可以是导体或非导体。对接近传感器进行了建模，得到了环形传感模式下的解析解。接近传感器可以使用MEMS技术批量制造，并且制造过程相对简单。原型传感器的测量显示出有希望的结果。接近传感器的尺寸可以从几百微米到基板的尺寸变化。传感器尺寸、感测图案和感测图案几何参数的灵活性使得传感器非常通用，并且能够在从微米到厘米的范围内精确测量接近度。传感器的小尺寸使得可以在许多空间受限的地方表面安装传感器。这一优势在许多领域至关重要，例如MEMS、微机器人、精密工程、机器自动化、检测工具和许多其他应用。接近传感器在测量材料的相对介电常数方面的能力也发现传感器在生物医学和组织工程中的有用应用。此外，这种微型接近传感器是许多其他类型传感器的理想构建模块，例如力、触觉和流量传感器。
This paper presents an innovative proximity sensor using microelectromechanical systems (MEMS) technology. The proximity sensor works on the principle of fringe capacitance. The target object does not need to be part of the measuring system and could be either a conductor or nonconductor. Modeling of the proximity sensor is performed and closed-form analytical solution is obtained for a ring-shaped sensing pattern. The proximity sensors could be batch fabricated using MEMS technology, and the fabrication process is relatively simple. Measurement of the prototype sensors revealed promising results. The size of the proximity sensor could vary from a few hundred micrometers to the size of the substrate. The flexibility on sensor size, sensing patterns, and sensing pattern geometrical parameters makes the sensor very versatile and capable of precision measurement of proximity in the range from micrometers to centimeters. The small size of the sensor makes it possible to surface mount the sensor in many space-constrained places. This advantage is vital in many areas, such as MEMS, microrobotics, precision engineering, machine automation, inspection tools, and many other applications. The ability of the proximity sensor in measuring relative permittivity of materials also finds the sensor useful applications in biomedical and tissue engineering. In addition, this micro proximity sensor is an ideal building block for many other types of sensors, such as force, tactile, and flow sensors.