Microstructure and mechanical properties of Ni-alloyed SiC coatings
Microstructure and mechanical properties of Ni-alloyed SiC coatings
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DOI：
10.1016/j.surfcoat.2012.10.020
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发表时间：
2012-12
影响因子：
5.4
通讯作者：
Fanping Meng;Bo Wang-;F. Ge;F. Huang
中科院分区：
文献类型：
--
作者：
Fanping Meng;Bo Wang-;F. Ge;F. Huang
以SiC和Ni为靶材，采用非反应磁控共溅射法制备了SiCNi复合涂层。用X射线能谱仪分析了涂层的化学成分。采用X射线衍射、扫描电子显微镜、透射电子显微镜和拉曼光谱对涂层的结构进行了表征。所有的涂层被发现是无定形的和致密的结构。在12.5at.%（质量分数）的涂层中，发现了由富SiC相和富NiSix相组成的纳米结构倪使用纳米压痕测试样品的机械性能。镀层的硬度在29 ~ 20 GPa之间，随Ni含量的增加，镀层的硬度逐渐降低。划痕试验表明，当涂层中的原子分数为12.5%时，涂层的韧性得到了提高倪韧性的提高可能是由于纳米结构的相互连接。
SiCNi composite coatings were synthesized by non-reactive magnetron co-sputtering from SiC and Ni targets. Chemical composition of the coatings was analyzed by X-ray energy dispersive spectrometer. The structure of the coatings was characterized by X-ray diffraction, scanning electron microscopy, transmission electron microscopy, and Raman spectroscopy. All coatings were found to be amorphous and dense structure. An interconnected nanostructure with two phases which are considered to be SiC-rich phase and NiSix-rich phase, is evident in the coating with 12.5at.% Ni. Mechanical properties of the samples were tested using nanoindentation. The hardness of the coatings ranging from 29GPa to 20GPa, decreased steadily with the increase of Ni content. An enhanced toughness proved by the scratch tests was obtained for the coating with 12.5at.% Ni. And the improvement of toughness might be attributed to the interconnected nanostructure.