Daiki Kamiya: "Hydrophilic and Hydrophobic Phenomena on Silicon Substrate for MEMS"Proc of SPIE Desing Characterization, and Packageing for MEMS and Microelectronics. Vol. 3893. 441-447 (1999)
Daiki Kamiya: "Hydrophilic and Hydrophobic Phenomena on Silicon Substrate for MEMS"Proc of SPIE Desing Characterization, and Packageing for MEMS and Microelectronics. Vol. 3893. 441-447 (1999)
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Daiki Kamiya:“MEMS 硅基板上的亲水性和疏水性现象”,SPIE MEMS 和微电子设计表征和封装过程。
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