A Reshaping Technology With Joule Heat For Three Dimensional Silicon Structures
A Reshaping Technology With Joule Heat For Three Dimensional Silicon Structures
复制标题
三维硅结构的焦耳热重塑技术
DOI：
10.1109/sensor.1995.717127
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发表时间：
1995
期刊：
影响因子：
--
通讯作者：
H. Fujita
中科院分区：
文献类型：
--
作者：
Y. Fukuta;T. Akiyama;H. Fujita
本文提出了一种新的基本整形技术，可以有效地实现真正的三维硅微结构。在此过程中，通过电流通过多晶硅结构产生的焦耳加热对弹性变形多晶硅结构进行退火。塑性变形产生永久的三维形状。成功地将这一基本工艺应用于不同多晶硅结构。利用结构变形测量的方法研究了退火效应的一些定量特征。
This paper presents a new basic reshaping technology which is efficient to realize real three dimensional silicon microstructures. In this process, the elastically deformed polysilicon structure is annealed by Joule heating generated by the current passing through the structure. Plastic deformation occurs resulting in permanent three-dimensional shapes. The application of this basic process to different polysilicon structures is successfully performed. Some quantitative characteristics of the annealing effects are also investigated by means of structure deformation measurements.