A multilayer structure for Love-mode acoustic sensors
A multilayer structure for Love-mode acoustic sensors
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DOI：
10.1016/s0924-4247(97)01698-1
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发表时间：
1998-03-15
影响因子：
4.6
通讯作者：
Harding, GL
中科院分区：
文献类型：
--
作者：
Du, J;Harding, GL
一种新型的多层结构，由聚合物/二氧化硅/ST-石英，已被评估的爱模式声传感器。这些新的设备的性能进行了比较与SiO2/石英和聚合物/石英器件。质量灵敏度，插入损耗，振荡频率的温度系数和频率稳定度作为层厚度的函数进行了研究。优化后的器件具有比SiO2/石英和此处生产的聚合物/石英器件更高的灵敏度。由于聚合物和SiO_2薄膜的补偿作用，在聚合物/SiO_2/ST-石英器件中可以获得降低的频率温度系数。一些器件在水中具有良好的稳定性，这对于生物传感应用是有希望的。(C)1998年Elsevier Science S.A.
A novel multilayer structure, consisting of polymer/SiO2/ST-quartz, has been evaluated for Love-mode acoustic sensors. The properties of these new devices have been compared with those of SiO2/quartz and polymer/quartz devices. Mass sensitivity, insertion loss, temperature coefficient of the oscillation frequency and frequency stability are studied as a function of the layer thickness. Optimized devices exhibit higher sensitivity than both the SiO2/quartz and the polymer/quartz devices produced here. Reduced temperature coefficient of frequency can be obtained in the polymer/SiO2/ST-quartz devices due to a compensating effect of the polymer and SiO2 films. Some of the devices have been operated efficiently in water with good stability, which is promising for biosensing applications. (C) 1998 Elsevier Science S.A.