Submicrometer-resolution three-dimensional imaging with hard x-ray imaging microtomography
Submicrometer-resolution three-dimensional imaging with hard x-ray imaging microtomography
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DOI：
10.1063/1.1515385
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发表时间：
2002-12-01
影响因子：
1.6
通讯作者：
Suzuki, Y
中科院分区：
文献类型：
--
作者：
Takeuchi, A;Uesugi, K;Suzuki, Y
开发了一种与硬 X 射线成像显微镜相结合的 X 射线显微断层扫描方法，其潜在空间分辨率为 10-100 nm 量级。该系统由SPring-8高亮度波荡器光源、用于降低照明相干性的光束扩散板、高精度旋转样品台、菲涅尔波带板物镜和高分辨率X射线成像探测器组成。观察并成功重建了多个样品的三维图像，节距为0.6μm。 (C) 2002 年美国物理研究所。
An x-ray microtomography method combined with hard x-ray imaging microscopy was developed that has a potential spatial resolution of the order of 10-100 nm. The system consists of a high-brilliance undulator source of SPring-8, a beam diffuser plate to reduce the coherence of the illumination, a high-precision rotating sample stage, a Fresnel zone plate objective, and a high-resolution x-ray imaging detector. The three-dimensional images of several samples were observed and successfully reconstructed with a pitch pattern of 0.6 mum. (C) 2002 American Institute of Physics.