Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe.
Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe.
复制标题
使用原子力显微镜和类金刚石碳 (DLC) 涂层硅探针在硅表面形成纳米图案
DOI：
10.1186/1556-276x-6-518
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发表时间：
2011-09-02
影响因子：
--
通讯作者：
Du Z
中科院分区：
文献类型：
--
作者：
Jiang X;Wu G;Zhou J;Wang S;Tseng AA;Du Z
Atomic force microscope (AFM) equipped with diamond-like carbon (DLC)-coated Si probe has been used for scratch nanolithography on Si surfaces. The effect of scratch direction, applied tip force, scratch speed, and number of scratches on the size of the scratched geometry has been investigated. The size of the groove differs with scratch direction, which increases with the applied tip force and number of scratches but decreases slightly with scratch speed. Complex nanostructures of arrays of parallel lines and square arrays are further fabricated uniformly and precisely on Si substrates at relatively high scratch speed. DLC-coated Si probe has the potential to be an alternative in AFM-based scratch nanofabrication on hard surfaces.
