High-sensitivity and wide-directivity ultrasound detection using high Q polymer microring resonators
High-sensitivity and wide-directivity ultrasound detection using high Q polymer microring resonators
复制标题
DOI：
10.1063/1.3589971
复制
发表时间：
2011-05-16
影响因子：
4
通讯作者：
Guo, L. Jay
中科院分区：
文献类型：
--
作者：
Ling, Tao;Chen, Sung-Liang;Guo, L. Jay
工作在近可见波长的小尺寸超高Q聚合物微环已被实验证明是在高频（bbb20 MHz）具有宽指向性的超低噪声超声探测器。通过在模具制造中结合抗阻回流和低偏置连续蚀刻和钝化工艺，获得了显著提高侧壁平滑度的印迹聚合物微环。利用直径60 μ m的自制探测器，在1-75 MHz范围内实现了21.4 Pa的超低噪声等效压力。该设备的宽接受角度和高灵敏度大大有利于超声相关成像。(C) 2011年美国物理研究所。(doi: 10.1063/1.3589971)
Small size ultrahigh Q polymer microrings working at near visible wavelength have been experimentally demonstrated as ultralow noise ultrasound detectors with wide directivity at high frequencies (> 20 MHz). By combining a resist reflow and a low bias continuous etching and passivation process in mold fabrication, imprinted polymer microrings with drastically improved sidewall smoothness were obtained. An ultralow noise-equivalent pressure of 21.4 Pa over 1-75 MHz range has been achieved using a fabricated detector of 60 mu m diameter. The device's wide acceptance angle with high sensitivity considerably benefits ultrasound-related imaging. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3589971]