Low-Cost Microfabrication Tool Box
Low-Cost Microfabrication Tool Box
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DOI：
10.3390/mi11020135
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发表时间：
2020-02-01
期刊：
影响因子：
3.4
通讯作者：
Whulanza, Yudan
中科院分区：
文献类型：
--
作者：
Charmet, Jerome;Rodrigues, Rui;Whulanza, Yudan
微系统是关键的使能技术，几乎在每个工业领域都有应用，包括体外诊断，能量收集，汽车，电信，药物筛选等。微系统，如微传感器和致动器，通常由尺寸小于1000微米的组件组成，可以通过大规模生产以低单位成本制造。然而，由于与微加工设备和工艺相关的初始投资费用，它们用于商业或教育目的的开发通常仅限于高收入国家的专门实验室。然而，最近的技术进步使低成本微加工工具的发展成为可能。在本文中，我们描述了一系列低成本的方法和设备（低于1000磅），在我们的实验室开发或调整和实施。我们描述了用于结构和功能材料微加工的光刻、微铣削、3D打印、光刻和丝网印刷等工艺。可用于塑造亚毫米特征尺寸的一系列材料的工艺在芯片实验室的背景下进行了演示，但它们可以适用于其他应用。我们预计，这篇论文将使研究人员能够在广泛的环境中建立一个低成本的微制造工具箱，这将激发人们对微系统的新兴趣。
Microsystems are key enabling technologies, with applications found in almost every industrial field, including in vitro diagnostic, energy harvesting, automotive, telecommunication, drug screening, etc. Microsystems, such as microsensors and actuators, are typically made up of components below 1000 microns in size that can be manufactured at low unit cost through mass-production. Yet, their development for commercial or educational purposes has typically been limited to specialized laboratories in upper-income countries due to the initial investment costs associated with the microfabrication equipment and processes. However, recent technological advances have enabled the development of low-cost microfabrication tools. In this paper, we describe a range of low-cost approaches and equipment (below 1000) pound, developed or adapted and implemented in our laboratories. We describe processes including photolithography, micromilling, 3D printing, xurography and screen-printing used for the microfabrication of structural and functional materials. The processes that can be used to shape a range of materials with sub-millimetre feature sizes are demonstrated here in the context of lab-on-chips, but they can be adapted for other applications. We anticipate that this paper, which will enable researchers to build a low-cost microfabrication toolbox in a wide range of settings, will spark a new interest in microsystems.