Contributed Review: Application of voice coil motors in high-precision positioning stages with large travel ranges
Contributed Review: Application of voice coil motors in high-precision positioning stages with large travel ranges
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投稿评论：音圈电机在大行程高精度定位平台中的应用
DOI：
10.1063/1.4932580
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发表时间：
2015
影响因子：
1.6
通讯作者：
Qian Jianqiang
中科院分区：
文献类型：
--
作者：
Shan Guanqiao;Li Yingzi;Zhang Liwen;Wang Zhenyu;Zhang Yingxu;Qian Jianqiang
