Coupled bulk acoustic wave resonator filters: key technology for single-to-balanced RF filters

Coupled bulk acoustic wave resonator filters: key technology for single-to-balanced RF filters
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DOI:
10.1109/mwsym.2004.1339126
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发表时间:
2004-06
期刊:
2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535)
影响因子:
--
通讯作者:
G. Fattinger;R. Aigner;W. Nessler
G. Fattinger;R. Aigner;W. Nessler
中科院分区:
其他
文献类型:
--
作者:
G. Fattinger;R. Aigner;W. Nessler

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耦合谐振器滤波器(CRF)是一种新型的体声波(BAW)器件,它是由两个压电谐振器以一定程度的声学相互作用的方式堆叠而成。CRF在输入和输出之间具有完全的电流隔离,因此能够提供具有模式转换(单端到平衡)以及阻抗变换的BAW滤波器。这些设备背后的基本概念进行审查。与SAW滤波器相比,CRF BAW滤波器的尺寸小得令人兴奋。第一个实验结果的CRF工作在1.8 GHz,已在英飞凌科技制造将提交。某些制造问题进行了讨论和测量的温度系数TCF显示。
Coupled Resonator Filters (CRF) are a new type of Bulk Acoustic Wave (BAW) device in which two piezoresonators are stacked on top of each other in a way that a certain degree of acoustic interaction occurs. CRFs feature complete galvanic isolation between input and output and thus enable to offer BAW filters with mode-conversion (single-ended to balanced) as well as impedance transformation. The basic concept behind these devices is reviewed. The size of a CRF BAW filter is excitingly small as compared to SAW filters. First experimental results for CRFs operating at 1.8 GHz which have been manufactured at Infineon Technologies will be presented. Certain manufacturing issues are discussed and measurements of the temperature coefficient TCF are shown.