Chemically Sensitized Thin-Film Bulk Acoustic Wave Resonators as Humidity Sensors
Chemically Sensitized Thin-Film Bulk Acoustic Wave Resonators as Humidity Sensors
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DOI：
10.1149/1.3496003
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发表时间：
2010-01-01
影响因子：
3.9
通讯作者：
Luo, J. K.
中科院分区：
文献类型：
--
作者：
Ashley, G. M.;Kirby, P. B.;Luo, J. K.
这项工作开发了一种基于薄膜体声波谐振器 (FBAR) 的湿度传感器，工作频率低于千兆赫兹。 FBAR 经过微加工、电学表征，然后涂有吸湿性聚合物聚[乙烯基吡咯烷酮] (PVP)。 FBAR 与 50 Omega 传输线电气连接，并密封在温度稳定的环境隔离室内。使用 FBAR 测量氮气流水分含量的变化，并使用外部湿度计进行验证。检查了原型传感器的响应时间、灵敏度和迟滞。在一些实验中，PVP 聚合物薄膜的厚度超过了 FBAR 的总厚度，但该设备仍然以足够的品质 Q 因数继续谐振，以允许连续跟踪响应湿度变化的频率变化。 (C) 2010 年电化学协会。 [DOI：10.1149/1.3496003] 保留所有权利。
A humidity sensor based on a thin-film bulk acoustic wave resonators (FBARs) operating at sub gigahertz frequencies has been developed in this work. The FBAR was microfabricated, electrically characterized, and then coated with the hygroscopic polymer poly[vinylpyrrolidone] (PVP). The FBAR was electrically connected to 50 Omega transmission lines and sealed within a temperature stabilized environmental isolation chamber. Changes in the moisture content of a nitrogen stream were measured with FBAR and verified with external hygroscopes. Response time, sensitivity, and hysteresis of the prototype sensor were examined. In some experiments, the thickness of the PVP polymer film exceeded the total thickness of the FBAR, yet the device still continued to resonate with sufficient quality Q factor to allow for continuous tracking of frequency changes in response to humidity change. (C) 2010 The Electrochemical Society. [DOI: 10.1149/1.3496003] All rights reserved.