High-density flat plasma production based on surface waves
High-density flat plasma production based on surface waves
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DOI：
10.1088/0963-0252/7/2/014
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发表时间：
1998-05
影响因子：
3.8
通讯作者：
H. Sugai;I. Ghanashev;M. Nagatsu
中科院分区：
文献类型：
--
作者：
H. Sugai;I. Ghanashev;M. Nagatsu
从应用于新一代超大规模集成电路器件和平板显示器的角度出发，综述了在低压(~lt；20mTorr)下无直流磁场产生大直径(~gt；30 cm)高密度微波等离子体的最新进展。了解放电物理--在过高密度条件下，平面等离子体几何结构中表面波的激发、传播和吸收--对于控制等离子体是必不可少的。在光学发射和微波场测量中清楚地发现了离散表面波模式的实验证据。对全波电磁色散的分析成功地识别了观测到的本征模。通过对波-等离子体相互作用的稳定性分析，得到了一个稳定性判据，该判据预测了实验中发现的功率-密度关系中的磁滞回线。考虑到最近的实验结果，讨论了表面波无碰撞吸收的可能性，即在共振层将模式转换为电子等离子体波。从等离子体技术的角度，介绍了表面波等离子体工具的实例(其中一些是商用的)，并强调了天线结构的重要性。最后，总结了表面波等离子体源与其他高密度源相比的优势。
Recent development of large-diameter (>30 cm) high-density microwave plasma production at low pressures (<20 mTorr) without an external DC magnetic field is reviewed in view of application to the next generation ULSI devices and flat panel displays. Understanding the discharge physics - excitation, propagation and absorption of the surface wave in a flat plasma geometry under overdense conditions - is indispensable for controlling the plasma. Experimental evidence of discrete surface-wave modes is clearly found in optical emission and microwave field measurements. The analysis of the full-wave electromagnetic dispersion successfully identified the observed eigenmodes. Stability analysis of the wave-plasma interaction resulted in a stability criterion predicting hysteresis loops in the power-density dependence, which were found in the experiment. A possibility of collisionless absorption of surface waves, i.e. mode conversion to electron plasma waves at the resonant layer, is discussed with the recent experimental results taken into account. From the plasma technology point of view, examples of surface-wave plasma tools (some of them commercially available) are introduced and the significance of the antenna structure is emphasized. Finally, the advantages of the surface-wave plasma source in comparison with other high-density sources are summarized.