Effects of substrate temperature on the ion-conducting properties of hydrogen-containing Ta_2O_5 thin films
Effects of substrate temperature on the ion-conducting properties of hydrogen-containing Ta_2O_5 thin films
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衬底温度对含氢Ta_2O_5薄膜离子导电性能的影响
DOI:
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发表时间:
2008
期刊:
影响因子:
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通讯作者:
T. Suzuki
中科院分区:
文献类型:
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作者:
Y. Takiguchi;F. Peng;Y. Abe;K. Sasaki;M. Kawamura;H. Itoh;T. Suzuki