Surface Profile Measurement of Specular Objects by Grating Projection Method. (2nd Report). Measurement of Ellipsoidal Mirror.
Surface Profile Measurement of Specular Objects by Grating Projection Method. (2nd Report). Measurement of Ellipsoidal Mirror.
复制标题
用光栅投影法测量镜面物体的表面轮廓。
DOI:
10.2493/jjspe.65.1111
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发表时间:
1999
期刊:
影响因子:
--
通讯作者:
Satoru Amano
中科院分区:
文献类型:
--
作者:
Masayuki Yamamoto;Masahito Tonooka;Y. Otani;T. Yoshizawa;Satoru Amano
This paper describes a grating projection method for three-dimensional profile measurement of specular objects and the method is utilized to measure a concave-shaped mirror that is difficult to measure using conventional non-contact methods in short time. A "deformed grating pattern" is observed when the reference grating is projected onto a mirror-like surface. This pattern formed by the surface reflection is captured by a CCD camera and analyzed on the basis of phase shifting technique to give three-dimensional profile of the specimen. Experimental results are shown with respect to an ellipsoidal mirror to verify the principle proposed here.