Surface Profile Measurement of Specular Objects by Grating Projection Method. (2nd Report). Measurement of Ellipsoidal Mirror.

Surface Profile Measurement of Specular Objects by Grating Projection Method. (2nd Report). Measurement of Ellipsoidal Mirror.
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用光栅投影法测量镜面物体的表面轮廓。

DOI:
10.2493/jjspe.65.1111
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发表时间:
1999
期刊:
影响因子:
--
通讯作者:
Satoru Amano
Satoru Amano
中科院分区:
--
文献类型:
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作者:
Masayuki Yamamoto;Masahito Tonooka;Y. Otani;T. Yoshizawa;Satoru Amano

文献摘要

被引文献

相似文献

本文介绍了一种用于镜面物体三维轮廓测量的光栅投影法,并利用该方法对传统非接触方法难以在短时间内测量的凹面镜进行了测量。当参考光栅投射到镜面上时,观察到“变形光栅图案”。这种由表面反射形成的图案由CCD相机捕获,并在相移技术的基础上进行分析,得到试样的三维轮廓。用椭球面镜的实验结果验证了本文提出的原理。
This paper describes a grating projection method for three-dimensional profile measurement of specular objects and the method is utilized to measure a concave-shaped mirror that is difficult to measure using conventional non-contact methods in short time. A "deformed grating pattern" is observed when the reference grating is projected onto a mirror-like surface. This pattern formed by the surface reflection is captured by a CCD camera and analyzed on the basis of phase shifting technique to give three-dimensional profile of the specimen. Experimental results are shown with respect to an ellipsoidal mirror to verify the principle proposed here.