Quantitative hydrocarbon sensor for ultra high vacuum applications

Quantitative hydrocarbon sensor for ultra high vacuum applications
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适用于超高真空应用的定量碳氢化合物传感器

DOI:
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发表时间:
2007
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通讯作者:
R. M. Lambert
R. M. Lambert
中科院分区:
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文献类型:
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作者:
David J. Davis;G. Kyriakou;R. B. Grant;M. Tikhov;R. M. Lambert

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本文介绍了一种在严格的工艺条件下用于碳氢化合物检测的有前途的新型定量传感装置。它具有良好的灵敏度和重现性,以及有用的选择性程度。该传感器是基于一种新的方法,利用众所周知的属性的氧/氧化钇稳定的氧化锆/铂固态电化学系统。相关的光谱和电化学测量提供了基本的洞察恒电位条件下的作用模式:工作电极的电位是由化学吸附氧的稳态覆盖率,这本身取决于之间的平衡的氧泵到Pt表面和碳氢化合物的冲击率。理论预测和测量的烃分压之间的定量协议被发现。非线性,发生在足够高的烃压力与少量的碳在表面的积累…
A promising new quantitative sensing device intended for hydrocarbon detection under stringent technological conditions is described. It exhibits good sensitivity and reproducibility, as well as a useful degree of selectivity. The sensor is based on a novel approach that exploits the well-known properties of the oxygen/yttria-stabilized zirconia/platinum solid-state electrochemical system. Correlated spectroscopic and electrochemical measurements provide fundamental insight into the mode of action under potentiostatic conditions:  the potential of the working electrode is set by the steady-state coverage of chemisorbed oxygen, which itself depends on the balance between rate of oxygen pumping to the Pt surface and the hydrocarbon impingement rate. Good quantitative agreement between theoretically predicted and measured hydrocarbon partial pressures is found. Nonlinearities that occur at sufficiently high hydrocarbon pressure are associated with the accumulation of small amounts of carbon at the surface of...