The micro ion drag pump using indium-tin-oxide (ITO) electrodes to resist aging
The micro ion drag pump using indium-tin-oxide (ITO) electrodes to resist aging
复制标题
采用氧化铟锡（ITO）电极抗老化的微离子拖泵
DOI：
10.1016/j.sna.2003.10.023
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发表时间：
2004
影响因子：
4.6
通讯作者：
Yu
中科院分区：
文献类型：
--
作者：
Lung;Jiun;Yu
本文介绍了一种采用氧化铟锡（ITO）平面电极的微离子拖动泵或喷射式电流体动力（EHD）微泵，以一种新颖的方式解决了老化问题。浸没在工作液中的电极的ITO膜，延长了无阀微泵的工作时间。它还使阳极键合在玻璃基板（ITO）与硅微通道密封封装中变得容易和可行。因此，可以实现离子拖拽泵的缩小或小型化。在61V直流电压下，ITO电极驱动乙醇的最大体积流量为356nl/min。在泵浦效率和ITO电极的长期稳定性方面也得到了更多的努力和改进。
This paper describes a micro ion drag pump, or an ejection type electro-hydrodynamic (EHD) micropump, using indium-tin-oxide (ITO) planar electrodes to deal with the aging problem in a novel way. The ITO film for the electrodes, which are immersing in the working liquid, prolongs the operation duration of the valveless micropump. It also makes anodic bonding easily and feasible in packaging the glass substrate (with ITO) hermetically with the silicon microchannels. Therefore, the scaling down or the miniaturization of ion drag pumps can be achieved herein. The ITO electrodes could drive the ethyl alcohol to have the maximum volumetric flow rate of 356nl/min by applying a dc voltage of 61V. More efforts and improvements on the pumping efficiency as well as the long-term stability of the ITO electrodes are acquired correspondingly.