Fully Integrated 2.4-GHz Flexible Rectifier Using Chemical-Vapor-Deposition Graphene MMIC Process
Fully Integrated 2.4-GHz Flexible Rectifier Using Chemical-Vapor-Deposition Graphene MMIC Process
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采用化学气相沉积石墨烯 MMIC 工艺的全集成 2.4GHz 柔性整流器
DOI：
10.1109/ted.2021.3049756
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发表时间：
2021
影响因子：
3.1
通讯作者：
R. Negra
中科院分区：
文献类型：
--
作者：
Chun;M. Wei;B. Uzlu;Zhenxing Wang;D. Neumaier;R. Negra
本文介绍了一种在柔性聚酰亚胺 (PI) 基板上完全集成的射频 (RF) 整流器。该电路采用化学气相沉积 (CVD) 石墨烯单片微波集成电路 (MMIC) 工艺设计和实现，其中采用金属绝缘体石墨烯 (MIG) 二极管来获得整流器所需的非线性。光滑的表面使得二氧化钛（Tio2）势垒界面形成良好，石墨烯具有更高的载流子传输性能。无源元件也在同一基板上开发。为了进行电路设计，根据测试键上的测量结果创建大信号二极管模型。整流器经过精心设计，通过适当调整 MIG 二极管和负载阻抗的大小来消除输入匹配网络。去除匹配网络可以实现紧凑的尺寸并减少整流器输入的损耗。然而，在 2.4 GHz 下测得的输入反射系数为 -17.5 dB，在输入功率为 15.7 dBm 时测得的峰值输出直流电压为 93 mV。据作者所知，该设计在柔性基板上实现了所有基于石墨烯的整流器中最高的 2.4 GHz 输出电压。得益于 CVD 石墨烯 MMIC 工艺，可以实现整流器阵列，因此无线传感器网络 (WSN) 和医疗植入物等低能耗设备是潜在的应用。
This article presents a fully integrated radio frequency (RF) rectifier on a flexible polyimide (PI) substrate. This circuit is designed and implemented using a chemical-vapor-deposition (CVD) graphene monolithic microwave integrated circuit (MMIC) process, where a metal–insulator–graphene (MIG) diode is employed to obtain the necessary nonlinearity for the rectifier. The smooth surface enables good titanium dioxide (Tio2) barrier interface formation and a higher carrier transport performance of the graphene. Passive components are also developed on the same substrate. To carry out the circuit design, a large-signal diode model is created based on measured results on a test key. A rectifier is deliberately designed for eliminating the input matching network by properly sizing the MIG diode and the load impedance. Removing the matching network results in a compact size and reduces the loss of the input of the rectifier. Nevertheless, the measured input reflection coefficient at 2.4 GHz is −17.5 dB, and measured, peak output dc voltage is 93 mV at an input power of 15.7 dBm. To the best of the authors’ knowledge, this design achieves the highest output voltage of all graphene-based rectifiers on a flexible substrate at 2.4 GHz. Thanks to the CVD graphene MMIC process, a rectifier array could be realized and thus, low-energy devices such as wireless-sensor-network (WSN) and medical implants are potential applications.