Back-Side Polymer-Coated Solid-State Nanopore Sensors
Back-Side Polymer-Coated Solid-State Nanopore Sensors
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DOI：
10.1021/acsomega.9b00946
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发表时间：
2019-07
期刊：
影响因子：
4.1
通讯作者：
I. Leong;M. Tsutsui;Tomoko Nakada;M. Taniguchi;Takashi Washio;T. Kawai
中科院分区：
文献类型：
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作者：
I. Leong;M. Tsutsui;Tomoko Nakada;M. Taniguchi;Takashi Washio;T. Kawai
我们系统地研究了聚合物涂层对固态纳米孔时间分辨率的影响。我们制作了一个与部分覆盖衬底表面的聚酰亚胺片集成的Si3N4纳米孔。在通过离子电流测量检测到分散在电解质缓冲液中的纳米颗粒后，我们观察到在聚合物层的更大覆盖范围内，更大的电阻脉冲高度以及更快的尾部电流衰减，从而表明触水Si3N4薄膜作为一个重要的电容器，通过纳米孔中的粒子快速迁移来延缓离子对离子封锁的离子电流响应。在此基础上，我们提出了背面聚合物涂层芯片设计，并通过开发底部表面层压有较厚的聚甲基丙烯酸甲酯层的纳米孔，证明了孔隙传感器时间分辨率的提高。本研究结果可能有助于开发具有嵌入式纳米通道和纳米电极的集成固态纳米孔传感器。
We systematically investigated the influence of polymer coating on temporal resolution of solid-state nanopores. We fabricated a Si3N4 nanopore integrated with a polyimide sheet partially covering the substrate surface. Upon detecting the nanoparticles dispersed in an electrolyte buffer by ionic current measurements, we observed a larger resistive pulse height along with a faster current decay at the tails under larger coverage of the polymeric layer, thereby suggesting a prominent role of the water-touching Si3N4 thin film as a significant capacitor serving to retard the ionic current response to the ion blockade by fast translocation of particles through the nanopores. From this, we came up with back-side polymer-coated chip designs and demonstrated improved pore sensor temporal resolution by developing a nanopore with a thick polymethyl-methacrylate layer laminated on the bottom surface. The present findings may be useful in developing integrated solid-state nanopore sensors with embedded nanochannels and nanoelectrodes.