An MEMS-based multiple electro-rheological bending actuator system with an alternating pressure source
An MEMS-based multiple electro-rheological bending actuator system with an alternating pressure source
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DOI：
10.1016/j.sna.2016.04.041
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发表时间：
2016-07-01
影响因子：
4.6
通讯作者：
Yokota, Shinichi
中科院分区：
文献类型：
--
作者：
Miyoshi, Tomoya;Yoshida, Kazuhiro;Yokota, Shinichi
本文提出了一种新型的基于MEMS的电流变（ER）弯曲致动器系统与交流压力源的微尺度应用与多微致动器。ER弯曲致动器系统基于通过使用液晶作为工作流体的同步控制阀对交变流的整流。它能够减少供应和返回管道的数量和尺寸。此外，交变压力系统的工作原理使所有关键的液压元件，如泵，阀和液压致动器适用于MEMS制造。本文采用一种新开发的PDMS微成型工艺，利用超声水溶解PVA牺牲层，在适当的外力作用下，通过分离工艺，实现了具有高深宽比和三维结构的弯曲件。采用标准硅微机械加工方法制备了电流变微阀，并对其特性进行了研究。制造的1.6 mm长的ER弯曲致动器表现出双向运动，实现了1.1 mm的位移（1.2 mm的曲率半径）和1.1 s的上升时间。此外，还给出了针尖位移随外加电压的变化特性。实验结果表明，该系统在大行程、大功率、高速、微小运动的控制系统中具有良好的应用前景。(C)2016爱思唯尔B.V.保留所有权利。
This paper presents a novel MEMS-based electro-rheological (ER) bending actuator system with an alternating pressure source for micro-scale applications with multiple microactuators. The ER bending actuator system is based on rectification of alternating flows by synchronized control valves using a liquid crystal as a working fluid. It enables the number and size of supply and return pipes to be reduced. In addition, the working principle of the alternating pressure system makes all critical hydraulic components such as the pump, valves and hydraulic actuators suitable for MEMS fabrication. In this paper, the bending parts featuring high-aspect-ratio and three-dimensional structures were realized by a newly developed PDMS micromolding process which was achieved by a separation process using poly (vinyl alcohol) (PVA) sacrificial layers dissolved by water ultrasonication with proper external forces. Control valves called ER microvalves were fabricated by standard silicon micromachining and their characteristics were investigated. The fabricated 1.6-mm long ER bending actuator demonstrated bi-directional motions that achieved a displacement of 1.1 mm (radius of curvature of 1.2 mm) and a rise time of 1.1 s. In addition, the characteristics of the tip displacements vs. applied voltages are also presented. The experimental results showed that this system is promising for control systems of high power, high-speed and miniature motion with large strokes. (C) 2016 Elsevier B.V. All rights reserved.