Integrating a Nanowire Laser in an on-Chip Photonic Waveguide
Integrating a Nanowire Laser in an on-Chip Photonic Waveguide
复制标题
将纳米线激光器集成到片上光子波导中
DOI：
10.1021/acs.nanolett.2c03364
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发表时间：
2022
期刊：
影响因子：
10.8
通讯作者：
Xuetao Gan
中科院分区：
文献类型：
--
作者：
Ruixuan Yi;Xutao Zhang;Fanlu Zhang;Linpeng Gu;Qiao Zhang;Liang Fang;Jianlin Zhao;Lan Fu;Hark Hoe Tan;Chennupati Jagadish;Xuetao Gan
我们报道了一种在无源光子集成电路(PIC)中通过确定性地将半导体纳米线(NW)嵌入到波导中来实现激光器的集成策略。放置在SiN板上的InP NW被聚合物层掩埋，聚合物层也起到电子束抗蚀剂的作用。利用电子束光刻技术，形成了精确嵌入纳米波的聚合物-氮化硅混合光波导。证实了波导型波导波导模的激光行为，更重要的是，波导波导模耦合到混合波导中形成了面内导模。在复杂的光子结构中进一步集成了多个嵌入波导的纳米激光器，以说明由纳米激光器提供的波导模可以被操纵用于片上信号处理，包括功率分割和波分复用。这种片上激光器的集成策略也适用于其他PIC平台，如硅和铌酸锂，并且可以通过沉积SiN或SiO_2来改变顶层包覆层，从而保证了其与CMOS的兼容性。
We report a simple and facile integration strategy of a laser source in passive photonic integrated circuits (PICs) by deterministically embedding semiconductor nanowires (NWs) in waveguides. InP NWs laid on a SiN slab are buried by a polymer layer which also acts as an electron-beam resist. With electron-beam lithography, hybrid polymer–SiN waveguides are formed with precisely embedded NWs. The lasing behavior of the waveguide-embedded NWs is confirmed, and more importantly, the NW lasing mode couples into the hybrid waveguide and forms an in-plane guiding mode. Multiple waveguide-embedded NW lasers are further integrated in complex photonic structures to illustrate that the waveguiding mode supplied by the NW lasers could be manipulated for on-chip signal processing, including power splitting and wavelength-division multiplexing. This integration strategy of an on-chip laser is applicable to other PIC platforms, such as silicon and lithium niobate, and the top cladding layer could be changed by depositing SiN or SiO2, promising its CMOS compatibility.