Production of CW High-Density Non-Equilibrium Plasma in the Atmosphere Using Microgap Discharge Excited by Microwave
Production of CW High-Density Non-Equilibrium Plasma in the Atmosphere Using Microgap Discharge Excited by Microwave
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微波激发微间隙放电在大气中产生连续波高密度非平衡等离子体
DOI：
10.1143/jjap.40.l238
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发表时间：
2001
影响因子：
1.5
通讯作者：
Y. Uchida
中科院分区：
文献类型：
--
作者：
A. Kono;T. Sugiyama;T. Goto;H. Furuhashi;Y. Uchida
介绍了一种连续波产生高压、高密度、非平衡等离子体的新技术。使用2.45 GHz的微波激发，在两个刀口电极之间维持稳定的大气辉光放电，所述刀口电极具有10 mm的长度并且跨越~100 µm的微间隙彼此面对。激光汤姆逊散射诊断表明，在100 W的微波功率下，微间隙中的等离子体密度高达1.6×1015 cm-3。N2第二正带的光发射表明微隙中的气体温度为1800 K，远低于电子温度。
A new technique for cw production of high-pressure, high-density, non-equilibrium plasma is presented. Using microwave excitation at 2.45 GHz, a stable atmospheric glow discharge was sustained between two knife-edge electrodes, having a length of 10 mm and facing each other across a ~100 µm microgap. Laser Thomson scattering diagnostics indicates that the plasma density in the microgap is as high as 1.6×1015 cm-3 at a microwave power of 100 W. The optical emission of the N2 second positive band indicates that the gas temperature in the microgap is 1800 K, much lower than the electron temperature.