Enhanced sensitivity of a surface acoustic wave based accelerometer
Enhanced sensitivity of a surface acoustic wave based accelerometer
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DOI：
10.1109/ultsym.2014.0611
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发表时间：
2014-10
期刊：
影响因子：
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通讯作者：
Wang Wen;Hu Yangqing;Liu Xinlu;He Shitang
中科院分区：
文献类型：
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作者：
Wang Wen;Hu Yangqing;Liu Xinlu;He Shitang
本文研制了一种基于表面声波（SAW）的加速度计，该加速度计由在无阻尼端具有相对较大的证明质量的柔性ST-X石英悬臂梁，直接沉积在靠近夹紧端的梁表面的双端口SAW谐振器模式，以及粘贴在金属封装基座上的SAW谐振器组成，用于温度补偿。从理论上确定了悬臂梁的最佳尺寸。指向证明质量的加速度使悬臂弯曲，引起声表面波沿梁传播的声传播特性的相对变化。利用SAW谐振器作为反馈元件的差分振荡结构的频率信号用于表征施加的加速度。利用精密振动表对传感器的外加加速度性能进行了评价。加速度实验灵敏度高、检出限低、线性好。
This paper developed a surface acoustic wave (SAW) based accelerometer, it was composed of a flexible ST-X quartz cantilever beam with a relatively substantial proof mass at the undamped end, a pattern of two-port SAW resonator deposited directly on surface of the beam adjacent to the clamped end for maximum strain sensitivity, and a SAW resonator affixed on the metal package base for temperature compensation. The optimal dimensions of the cantilever beam were determined theoretically. Acceleration directed to the proof mass flex the cantilever, inducing relative changes in the acoustic propagation characteristics of the SAW traveling along the beams. The frequency signal from the differential oscillation structure utilizing the SAW resonators as the feedback element is used to characterize the applied acceleration. The sensor performance towards applied acceleration was evaluated by using the precise vibration table. High sensitivity, low detection limit and good linearity were observed in the acceleration experiments.