Laser-SQUID Microscopy as a Novel Tool for Inspection, Monitoring and Analysis of LSI-Chip-Defects: Nondestructive and Non-electrical-contact Technique
Laser-SQUID Microscopy as a Novel Tool for Inspection, Monitoring and Analysis of LSI-Chip-Defects: Nondestructive and Non-electrical-contact Technique
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激光 SQUID 显微镜作为检查、监测和分析 LSI 芯片缺陷的新工具：无损和非电接触技术
DOI：
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发表时间：
2002
影响因子：
0.5
通讯作者：
K. Nikawa
中科院分区：
文献类型：
--
作者：
K. Nikawa
