A 2D optomechanical focused laser spot scanner: analysis and experimental results for microstereolithography
A 2D optomechanical focused laser spot scanner: analysis and experimental results for microstereolithography
复制标题
二维光机聚焦激光点扫描仪：微立体光刻的分析和实验结果
DOI：
10.1088/0960-1317/20/1/015035
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发表时间：
2009
影响因子：
2.3
通讯作者：
Suhas P. Deshmukh
中科院分区：
文献类型：
--
作者：
P. Gandhi;Suhas P. Deshmukh
本文提出并分析了一种二维光机械聚焦激光光斑扫描系统(正在申请专利)，该系统可以在大范围扫描范围内实现高速度、高分辨率的均匀强度聚焦光斑扫描。在聚焦光斑特性的变化影响微/纳米立体光刻、激光微加工、扫描光钳、光学扫描显微镜等应用的性能的情况下，这种扫描是有用的。所提出的扫描是通过反射镜和透镜的直线运动来保持激光的运动和光轴对齐来实现的。采用两个串联的双平行四边形弯曲机构，并在其周围发展机电一体化，实现了较高的速度和分辨率。光学分析从数值上证明了该系统的有效性，并得到了实验结果的进一步支持。另外还进行了分析，以证明扫描仪在实际应用中产生的小未对准误差情况下的稳健性。虽然所提出的扫描仪在上述几个应用中总体上是有用的，但本文的讨论集中在微立体光刻术上。
This paper proposes and analyzes a 2D optomechanical-focused laser spot scanning system (patent pending) which allows uniform intensity focused spot scanning with high speed and high resolution over a large range of scan. Such scanning is useful where variation of focused spot characteristics affects the performance of applications such as micro-/nano-stereolithography, laser micro-machining, scanning optical tweezers, optical scanning microscopy, and so on. Proposed scanning is achieved by using linear movement of mirrors and lens maintaining the alignment of motion and optical axis of laser. Higher speed and high resolution at the same time are achieved by use of two serial double parallelogram flexural mechanisms with mechatronics developed around them. Optical analysis is carried out to demonstrate effectiveness of the proposed system numerically and is further supported by the experimental results. Additional analysis is carried out to demonstrate robustness of the scanner in the case of small misalignment errors incurred in actual practice. Although the proposed scanner is useful in general in several applications mentioned above, discussion in this paper is focused on microstereolithography.