Backscattering correction factor for AuCu alloys in quantitative Auger analysis
Backscattering correction factor for AuCu alloys in quantitative Auger analysis
复制标题
定量俄歇分析中 AuCu 合金的后向散射校正因子
DOI：
10.1002/sia.740100506
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发表时间：
1987
期刊：
影响因子：
--
通讯作者：
S. Ichimura
中科院分区：
文献类型：
--
作者：
Ding Ze;R. Shimizu;S. Ichimura
反向散射因子 R 可以校正定量 AES 分析中的基体效应，它是通过对被提议作为定量表面化学分析的测试标准样品的 AuCu 合金系统进行蒙特卡罗计算而获得的。蒙特卡罗算法基于Gryzinski激励函数与Bethe阻止本领的结合使用，用于通过部分波展开法获得的非弹性散射和弹性散射截面。对入射角为 0° 和 45° 的 5 keV 和 10 keV 电子的 R 进行计算，得到函数表示 R(Z, U) = A(Z)UB(Z) + C(Z)，其中 Z 是样品的平均原子序数，U 是初级能量与结合能的比率。该表示描述了最大误差在 2% 以内的计算 R 值。
The backscattering factor R, which corrects matrix effects in quantitative AES analysis, was obtained from Monte Carlo calculations for the AuCu alloy system being proposed as test standard samples for quantitative surface chemical analysis. The Monte Carlo algorithm is based on the combined use of the Gryzinski's excitation function with the Bethe's stopping power for inelastic scattering and elastic scattering cross section obtained by partial wave expansion method. The calculation of R for 5 keV and 10 keV electrons at angles of incidence 0° and 45° lead to the functional representation R(Z, U) = A(Z)UB(Z) + C(Z), where Z is the mean atomic number of the sample and U the ratio of the primary energy to the binding energy. This representation describes the calculated R values within the maximum error 2%.