WIDE-BANDWIDTH MEMS-SCALE PIEZOELECTRIC ENERGY HARVESTER
WIDE-BANDWIDTH MEMS-SCALE PIEZOELECTRIC ENERGY HARVESTER
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宽带 MEMS 级压电能量收集器
DOI：
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发表时间：
2009
期刊：
影响因子：
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通讯作者：
A. Hajati
中科院分区：
文献类型：
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作者：
A. Hajati
设计了一种宽频带谐振型薄膜PZT MEMS能量采集器，并对其进行了建模、制作和测试。它通过压电效应从寄生的环境振动中获取能量，并具有很大的幅度和频率范围。与传统的基于弯曲应变的高Q悬臂梁的设计不同，新的设计利用了双锚固梁的拉伸拉伸应变。我们的设计利用了伸展梁的非线性，实现了宽带共振，从而在输入振动频谱的不确定性中实现了稳健的发电。该器件是通过表面微加工和体微机械加工相结合的微加工工艺制造的。释放的器件经过封装、极化和机电测试，以验证系统的宽带非线性行为。
A wide-band resonating thin film PZT MEMS energy harvester has been designed, modeled, fabricated, and tested. It harvests energy from parasitic ambient vibration with a wide range of amplitude and frequency via piezoelectric effect. Contrary to the traditional designs based on high-Q cantilever beams which use the bending strain, the new design utilizes the tensile stretching strain in doubly-anchored beams. Our design exploits the nonlinearity of the stretching beam that enables a wide-band resonance and thereby a robust power generation amid the uncertainty of the input vibration spectrum. The device is microfabricated by a combination of surface and bulk micromachining processes. Released devices are packaged, poled and electromechanically tested to verify the wide-bandwidth nonlinear behavior of the system.