Observation of elliptical motion in the torsion coupler of ultrasonic motor using optical heterodyne interferometer
Observation of elliptical motion in the torsion coupler of ultrasonic motor using optical heterodyne interferometer
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利用光外差干涉仪观测超声波电机扭力耦合器的椭圆运动
DOI：
10.1002/ecjb.4420710707
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发表时间：
1988
期刊：
影响因子：
--
通讯作者：
N. Umeda
中科院分区：
文献类型：
--
作者：
N. Umeda
利用光学外差干涉仪，对振荡型超声电机扭力耦合器内的椭圆运动进行了无创观察。研究扭力耦合器的椭圆运动对超声电机效率的提高和优化设计具有重要意义。然而，到目前为止，只进行了显微镜观察，因此精度没有达到期望的那么高。本文利用基于稳频横向塞曼激光器的光学外差干涉仪，通过超声振动检测多普勒频移频率，从而得到扭转耦合器的振动波形。用同一光学系统分别测量了转子接触面和光束端面的振动。根据它们的振幅和相位，计算出椭圆轨迹。另一种方法是用两个干涉仪系统同时测量两个表面的振荡，并在XY示波器上实时显示它们的椭圆关系。用第二种方法成功地观察到了超声电机驱动频率对梁上各点的振荡和椭圆形状的影响。
An elliptical motion in the torsion coupler of an oscillator-type ultrasonic motor has been observed noninvasively by means of an optical heterodyne interferometer. Studies of the elliptical motion in the torsion coupler are important for the research on improvement of the efficiency and optimum design of an ultrasonic motor. However, to date, only microscope observation has been carried out and hence accuracy is not as high as desired. In this paper, an optical heterodyne interferometer based on a frequency-stabilized transverse Zeeman laser is used for detection of the Doppler shift frequency by an ultrasonic vibration so that the vibration waveform of the torsion coupler has been regenerated. The oscillations of the rotor contact plane and side plane of the end of the beam have been measured individually by an identical optical system. From their amplitudes and the phases, the elliptical loci have been computed. In another method, the oscillations of the two surfaces have been measured simultaneously with two interferometer systems and their elliptical relations have been displayed in real time on an XY oscilloscope. Oscillations at each point on the beam and the variations of the elliptical shape versus the driving frequency of the ultrasonic motor have been observed successfully by the second method.