Development of Superconducting-Tunnel-Junction Array Detectors with Three-Dimensional Structure Beyond 1000-Pixels
Development of Superconducting-Tunnel-Junction Array Detectors with Three-Dimensional Structure Beyond 1000-Pixels
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千像素以上三维结构超导隧道结阵列探测器研制
DOI：
10.1007/s10909-015-1433-4
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发表时间：
2015
影响因子：
2
通讯作者：
Masataka Ohkubo
中科院分区：
文献类型：
--
作者：
Go Fujii;Masahiro Ukibe;Shigetomo Shiki;Masataka Ohkubo
超导隧道结（STJ）阵列X射线探测器在软X射线范围内表现出优异的荧光产额X射线吸收精细结构（XAFS）特性。对于高通量XAFS分析，我们开发了一种新的紧密堆积的STJ排列，相邻的STJ像素之间的空间为10米（使用正确的空间），通过使用三维多层结构（3D-STJ）与布线层下面的STJ像素层。在这项工作中，为了解决双峰响应起源于吸收事件在顶部和底部电极，我们已经制造了3D-STJ与非对称层结构。对0.7keV以下的软X射线，获得了单峰响应。100个像素的3D-STJ阵列探测器的工作产额为93%，C-KX射线半峰全宽平均能量分辨率为12.5 ± 0.7 eV。
Superconducting-tunnel-junction (STJ) array X-ray detectors have exhibited excellent characteristics for fluorescence-yield X-ray absorption fine structure (XAFS) in a soft X-ray range. For high-throughput XAFS analyses, we developed a new close-packed STJ arrangement with a space of 10m (use the correct space) between adjacent STJ pixels by using three-dimensional multilayer structure (3D-STJ) with the wiring layer underneath the STJ pixel layer. In this work, in order to solve a double-peak response originating from absorption events in the top and bottom electrodes, we have fabricated the 3D-STJ with an asymmetric layer structure. Single-peak response for the soft X-rays below 0.7 keV was obtained. The closed-packed 3D-STJ array detector with 100 pixels has an operation yield of 93 % and a mean energy resolution of 12.50.7 eV in full-width at half-maximum for the C-KX-ray.