Effect of a magnetic field on fabrication of Si protrusions by local surface melting of a narrow current path on a Si wafer via resistive heating
Effect of a magnetic field on fabrication of Si protrusions by local surface melting of a narrow current path on a Si wafer via resistive heating
复制标题
磁场对通过电阻加热硅晶片上窄电流路径的局部表面熔化制造硅突起的影响
DOI：
10.35848/1347-4065/acbff7
复制
发表时间：
2023
影响因子：
1.5
通讯作者：
Tomitori Masahiko
中科院分区：
文献类型：
--
作者：
Nishimura Takashi;Tomitori Masahiko
