Characteristics of Cr2N/Cu multilayered thin films with different bilayer thickness
Characteristics of Cr2N/Cu multilayered thin films with different bilayer thickness
复制标题
DOI：
10.1016/j.surfcoat.2009.05.039
复制
发表时间：
2009-12
影响因子：
5.4
通讯作者：
Chia-Lin Li;Fanjing Wu;Jyh-Wei Lee;Y. Tsai;Li-Chun Chang
中科院分区：
文献类型：
--
作者：
Chia-Lin Li;Fanjing Wu;Jyh-Wei Lee;Y. Tsai;Li-Chun Chang
采用双极非对称反应脉冲直流磁控溅射系统周期性沉积了Cr 2N/Cu纳米多层膜。多层膜的晶体结构由掠射角X射线衍射仪测定。用原子力显微镜（AFM）、扫描电子显微镜（SEM）和透射电子显微镜（TEM）分别对薄膜的微观结构进行了观察。利用纳米压痕仪、显微维氏硬度计和销盘磨损试验分别对薄膜的硬度、断裂韧性和摩擦学性能进行了测试。3.5 wt.%中的电化学测试NaCl水溶液中的腐蚀性能进行评价的多层涂层。纳米结构多层涂层的双层周期被控制在5至40 nm的范围内。发现硬度随着双层周期的减小而增加，并在6-12 nm左右的小周期处趋于平稳。双层周期为5和6 nm的Cr 2N/Cu多层涂层具有高硬度、良好的摩擦学性能和良好的耐腐蚀性能。
Nanostructured Cr2N/Cu multilayer coatings were deposited periodically by a bipolar asymmetric reactive pulsed DC magnetron sputtering system. The crystalline structure of multilayer coatings was determined by a glancing angle X-ray diffractometer. Microstructures of thin films were examined by an atomic force microscopy (AFM), scanning electron microscopy (SEM) and transmission electron microscopy (TEM), respectively. A nanoindenter, a micro Vickers hardness tester and pin-on-disk wear tests were used to evaluate the hardness, fracture toughness and tribological properties of the thin films, respectively. Electrochemical tests in 3.5 wt.% NaCl aqueous solution were performed to evaluate the corrosion resistance of multilayered coatings. The bilayer period of the nanostructured multilayer coatings were controlled within the range from 5 to 40 nm. It was found that the hardness increased with decreasing bilayer period and leveled off at small periods around 6–12 nm. The Cr2N/Cu multilayered coatings with bilayer periods of 5 and 6 nm exhibited a combination of high hardness, good tribological and good anticorrosion performance in this study.