Method for reducing debris and thermal destruction in femtosecond laser processing by applying transparent coating
Method for reducing debris and thermal destruction in femtosecond laser processing by applying transparent coating
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DOI：
10.1007/s00339-005-3422-y
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发表时间：
2006-02
期刊：
影响因子：
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通讯作者：
D. Kawamura;A. Takita;Y. Hayasaki;N. Nishida
中科院分区：
文献类型：
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作者：
D. Kawamura;A. Takita;Y. Hayasaki;N. Nishida
被紧聚焦的飞秒激光脉冲处理的腔被环形突起、碎片和小液滴包围。为了减少这些不受欢迎的损害，我们建议在靶材上涂覆一层透明材料。PMMA(聚甲基丙烯酸甲酯)具有表面不被单次脉冲辐射烧蚀的厚度，减少了高密度热蒸气羽流与靶材相互作用引起的溶解和汽化。此外，由于包覆层，目标表面处的材料不会自由逃逸。结果，产生了亚微米大小的空腔，减少了碎片，减少了热破坏面积。
A cavity processed by a tightly focused femtosecond laser pulse is surrounded by a ring-shaped protrusion, debris, and small droplets. In order to reduce these undesired damages, we propose processing with a coating of transparent material on a target material. PMMA (poly-methyl methacrylate) with the thickness that its surface is not ablated by a single pulse irradiation reduces dissolution and vaporization caused by the interaction between a high-density hot vapor plume and the target material. Furthermore, the material at the target surface does not escape freely due to the coating layer. As a result, a submicrometer-sized cavity is produced with a reduction of debris and a smaller thermal-destruction area.