A Directly Patternable, Click-Active Polymer Film via Initiated Chemical Vapor Deposition
A Directly Patternable, Click-Active Polymer Film via Initiated Chemical Vapor Deposition
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DOI：
10.1002/marc.200800404
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发表时间：
2008-10-22
影响因子：
4.6
通讯作者：
Gleason, Karen K.
中科院分区：
文献类型：
--
作者：
Im, Sung Gap;Kim, Byeong-Su;Gleason, Karen K.
使用双功能聚合物膜，聚（甲基丙烯酸炔丙酯）（PPMA）在200 nm的分辨率下图案化的点击活性表面。甲基丙烯酸炔丙酯（PMA）的市售单体通过引发化学气相沉积（iCVD）在单个步骤中聚合。FT-IR和X-射线光电子能谱证实保留的点击活性乙炔官能团在体和表面的iCVD膜，分别。在沉积之前用硅烷偶联剂处理基底导致iCVD PPMA聚合物接枝到各种无机表面上。该接枝技术提供PPMA层所需的化学和机械稳定性，以经受用于点击官能化的随后的湿化学步骤。叠氮基官能化的香豆素染料的成功连接被证明。此外，PPMA膜显示出对电子束照射的直接正色调灵敏度，这使得能够在不使用抗蚀剂层的情况下进行电子束图案化。多功能PPMA iCVD层的直接电子束曝光导致200 nm图案，量子点纳米颗粒通过点击化学选择性地缀合在基板上。
Click-active surfaces patterned at 200 nm resolution are demonstrated using the dual functional polymeric film, poly(propargyl methacrylate) (PPMA). The commercially available monomer of propargyl methacrylate (PMA) is polymerized in a single step by initiated chemical vapor deposition (iCVD). FT-IR and X-ray photoelectron spectroscopy confirm retention of the click-active acetylene functional group in the bulk and surface of the iCVD film, respectively. Treating substrates with silane coupling agents prior to deposition results in grafting of iCVD PPMA polymers onto various inorganic surfaces. This grafting technique provides the chemical and mechanical stability required for the PPMA layer to survive the subsequent wet chemical steps used for click functionalization. Successful attachment of an azido-functionalized coumarin dye is demonstrated. Moreover, the PPMA film displays direct positive-tone sensitivity to e-beam irradiation, which enables e-beam patterning without the use of a resist layer. Direct e-beam exposure of the multifunctional PPMA iCVD layer results in a 200 nm pattern to which quantum dot nanoparticles are selectively conjugated on the substrates by click chemistry.