多層Nd-Fe-B/Ta垂直磁化薄膜の微細組織と磁気特性
多層Nd-Fe-B/Ta垂直磁化薄膜の微細組織と磁気特性
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多层Nd-Fe-B/Ta垂直磁化薄膜的微观结构与磁性能
DOI：
10.3379/jmsjmag.28.1043
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发表时间：
2004
影响因子：
--
通讯作者：
稔 上原
中科院分区：
文献类型：
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作者：
稔 上原
采用磁控溅射法在玻璃衬底上制备了厚度为200 nm的Nd-Fe-B或Nd-（Fe，Co）-B和厚度为10 nm的Ta多层膜。周期性分布的Ta层减小并规则化了薄膜中形成的Nd_2Fe_（14）B晶粒尺寸。Ta层的存在增强了Nd 2Fe 14 B晶粒的取向，使晶粒的c轴指向垂直于薄膜平面的方向。Co的加入降低了Nd-Fe-B薄膜的最佳沉积温度，抑制了Nd_2Fe_（14）B晶粒尺寸的局部变化，即使在总厚度约为10 μm的薄膜中也是如此。[Nd-Fe-B（200 nm）/Ta（10 nm）] 5薄膜在垂直于膜面方向上有很强的退磁效应，但仍获得了Jr = 1.30 T，HcJ = 927 kA，（BH）max = 319 kJ/m3的永磁性能，而[Nd-Fe-B（10 nm）]5薄膜的Jr = 1.24 T，HcJ = 1210 kA，[Nd-（Fe，Co）-B（200 nm）/Ta（10 nm）]50薄膜的（BH）max = 279 kJ/m3。
Multilayered films consisting of alternately deposited 200-nm-thick Nd-Fe-B or Nd-(Fe, Co)-B and 10-nm-thick Ta layers were prepared by magnetron sputtering on heated glass substrates. The periodically allocated Ta layers reduced and regularized the size of the Nd2Fe14B grains evolved in the films. It was also proved that the Ta layers enhanced the alignment of the Nd2Fe14B grains with their c-axes pointing in a direction normal to the film plane. The addition of Co to the Nd-Fe-B films decreased the optimum temperature to which the substrate should be heated during the deposition, and suppressed the local variation in the grain size of Nd2Fe14B, even in films with a total thickness of about 10 μm. In spite of the strong demagnetization effect in the direction normal to the film plane, permanent magnetic properties of Jr = 1.30 T, HcJ = 927 kA, and (BH)max = 319 kJ/m3 were obtained for [Nd-Fe-B (200 nm)/Ta (10 nm)]5 film, and Jr = 1.24 T, HcJ = 1210 kA, and (BH)max = 279 kJ/m3 for a [Nd-(Fe, Co)-B (200 nm)/Ta (10 nm)]50 film.