CNT-based photopatternable nanocomposites with high electrical conductivity and optical transparency

CNT-based photopatternable nanocomposites with high electrical conductivity and optical transparency
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具有高导电性和光学透明性的基于CNT的可光图案化纳米复合材料

DOI:
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发表时间:
2010
期刊:
影响因子:
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通讯作者:
T. Pan
T. Pan
中科院分区:
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文献类型:
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作者:
H. Cong;L. Hong;Ryan S. Harake;T. Pan

文献摘要

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在本文中,介绍了一种纳米复合材料的方法,以提供导电和光学透明的微图案上的任何灵活的基板上采用光刻为基础的微细加工。纳米复合材料联合收割机结合了单壁碳纳米管(SWNT)的高度定向的纳米网络和导电性与SU-8光刻胶的可图案化性和光学透明性。可重复图案化的纳米复合材料具有90%的高光学透明度和27.5 S m−1的高电导率,最小特征分辨率为10 µm。此外,一个有趣的纳米桥现象已被发现在制造过程中的微尺度功能。此外,可图案化的透明导电纳米复合材料已证明其在生物医学传感中的应用具有出色的适应性和灵活性。
In this paper, a nanocomposite approach is introduced to provide both electrically conductive and optically transparent micropatterns on any flexible substrate employing photolithography-based microfabrication. The nanocomposite materials combine the highly directional nanoscopic networks and electrical conductivity of single-wall carbon nanotubes (SWNTs) with the photopatternability and optical transparency of SU-8 photoresist. The photopatternable nanocomposites have yielded high optical transparency of 90% and high electrical conductivity of 27.5 S m−1 with the minimal feature resolution of 10 µm. Additionally, an interesting nano-bridge phenomenon has been discovered during fabrication of the microscale features. Moreover, the photopatternable transparent conductive nanocomposite has demonstrated its application to biomedical sensing for exceptional adaptability and flexibility.