A Weak Form Nonlinear Model for Thermal Sensitivity of Love Wave Mode on Layered Structures

A Weak Form Nonlinear Model for Thermal Sensitivity of Love Wave Mode on Layered Structures
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DOI:
10.1109/tuffc.2020.2968007
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发表时间:
2020-01
期刊:
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
影响因子:
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通讯作者:
Yang Yang-Yang;H. Mishra;Qiaozhen Zhang;S. Hage-Ali;Tao Han;O. Elmazria
Yang Yang-Yang;H. Mishra;Qiaozhen Zhang;S. Hage-Ali;Tao Han;O. Elmazria
中科院分区:
其他
文献类型:
--
作者:
Yang Yang-Yang;H. Mishra;Qiaozhen Zhang;S. Hage-Ali;Tao Han;O. Elmazria

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勒夫波模式热敏特性的精确理论模型对于结构设计、温度补偿和热行为预测具有重要意义。本文提出了一种弱形式的非线性模型来计算任意层状结构上Love波的热敏性。模型中考虑了三阶材料常数以及基片、电极和波导层之间的热应力和应变张量。将9 × 9等效弹性矩阵和3 × 9等效压电矩阵引入到非线性本构方程和边界条件中,采用弱形式表达。在ZnO/叉指换能器(IDT)/石英结构上制作了一个温度补偿的Love波模谐振器。通过实验与理论分析结果的对比验证了理论模型的正确性。该模型对勒夫波器件和传感器的设计具有一定的指导意义。
A precise theoretical model for the thermal sensitivity of Love wave mode is significant in the structure design, temperature compensation, and the prediction of thermal behavior. This article proposes a weak form nonlinear model to calculate the thermal sensitivity of Love waves on arbitrary layered structures. The third-order material constants, as well as the thermal stress and strain tensors between the substrate, electrodes, and wave-guiding layer, are considered in the model. The $9 \times 9$ effective elastic and the $3 \times 9$ effective piezoelectric matrixes are imported into the nonlinear constitutive equations and boundary conditions using weak form expressions. A temperature-compensated Love wave mode resonator on a layered ZnO/interdigital transducer (IDT)/quartz structure is obtained. The theoretical model is verified through the comparison of experimental and analytical results. The model is beneficial for the design of Love wave devices and sensors.