High-efficient fabrication of infrared optics with uniform microstructures by a semi-ductile diamond milling approach
High-efficient fabrication of infrared optics with uniform microstructures by a semi-ductile diamond milling approach
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DOI：
10.1007/s00170-023-11140-7
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发表时间：
2023-03
期刊：
影响因子：
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通讯作者：
Peizheng Li;Sujuan Wang;S. To;Zhanwen Sun;Jie Jiao;Shijun Xu-
中科院分区：
文献类型：
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作者：
Peizheng Li;Sujuan Wang;S. To;Zhanwen Sun;Jie Jiao;Shijun Xu-
尽管超精密金刚石铣削已广泛应用于硬脆材料的自由曲面加工，但对其半韧性加工方法的研究却很少。超精密金刚石铣削可以通过延性加工产生高质量的微结构表面，但加工效率较低。本研究提出了一种充分考虑表面曲率变化、微观结构几何特征和加工参数的半韧性金刚石铣削方法。首先考虑超精密金刚石铣削的运动学特性，建立半延性加工模型，并建立加工参数与破碎长度之间的关系。此外，通过考虑微观结构形态特征，将后续刀具旋转循环在进给方向上产生的切屑厚度与材料的韧脆转变临界切削深度相匹配，并在步进方向上保持恒定的刀具剩余高度，并使用迭代算法规划切削过程中刀具旋转中心的位置，从而确定动态变化的刀具轨迹。最后，半韧性金刚石铣削方法与传统金刚石铣削方法的对比实验结果表明，SDDM加工出的正弦曲面表面粗糙度仅为18 nm，面形精度一致，证明了该方法在硬脆材料微结构生成方面的高质量和高效率。
Although ultra-precision diamond milling has been widely used for free-form machining surfaces on hard and brittle materials, there has been little research on its semi-ductile machining methods. Ultra-precision diamond milling can produce high-quality microstructured surfaces by ductile machining, but the machining efficiency is low. This study proposes a semi-ductile diamond milling method by fully considering the curvature variation of the surface, microstructure geometry characteristics, and machining parameters. Firstly, we consider the kinematic characteristics of ultra-precision diamond milling, establish the semi-ductile machining model, and also establish the relationship between machining parameters and fragmentation length. Moreover, by taking into account microstructural morphological characteristics, matching the chip thickness produced by subsequent tool rotation cycles in the feed direction with the material’s critical cutting depth of ductile–brittle transition and maintaining a constant tool residual height in the step direction, and using an iterative algorithm to plan the position of the tool center of rotation during cutting, the dynamically changing tool trajectory is determined. Finally, the results of the comparison experiment between the semi-ductile diamond milling method and the conventional diamond milling method demonstrate that the sinusoidal surface machined by the SDDM has a surface roughness of only 18 nm and a consistent face shape accuracy, demonstrating the high quality and high efficiency of the method in creating microstructures on hard and brittle materials.