Phase Change Nanoelectromechanical Relay for Nonvolatile Low Leakage Switching
Phase Change Nanoelectromechanical Relay for Nonvolatile Low Leakage Switching
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DOI：
10.1002/aelm.202200085
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发表时间：
2022-04
影响因子：
6.2
通讯作者：
J. Best;Mohammad Ayaz Masud;M. P. Boer;G. Piazza
中科院分区：
文献类型：
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作者：
J. Best;Mohammad Ayaz Masud;M. P. Boer;G. Piazza
介绍了高度可扩展的相变机电继电器的设计、建模和实验验证。相变 NEMS 继电器 (PCNR) 是一种非易失性机械继电器，由相变材料的体积膨胀驱动。 GeTe被用作活性相变材料，通过在体积相差10%的非晶相和晶相之间转换来改变非易失性继电器状态。相变是由焦耳加热相邻金属层引起的。开发有限元分析 (FEA) 模型是为了预测不同驱动脉冲的执行器温度分布和淬火时间。开发了其他模型来模拟致动器偏转，包括致动脉冲期间熔融相变材料的回流。制造的最小器件的加热器占地面积为 3 µm × 1 µm，气隙为 20 nm。 FEA 模型计算出该器件的驱动电压、能量和开关电流比分别为 1.1 V、42 nJ 和 108，并经过实验验证。 PCNR 缩小至 15 nm × 5 nm 加热器足迹，气隙为 2 nm，预计在 400 mV 和 1.7 pJ 下启动。
The design, modeling, and experimental validation of a highly scalable phase change electromechanical relay are present. The Phase Change NEMS Relay (PCNR) is a nonvolatile mechanical relay actuated by the volumetric expansion of phase change material. GeTe is used as the active phase change material, and nonvolatile relay states are changed by converting it between amorphous and crystalline phases, which differ in volume by 10%. Phase conversion is induced by Joule heating an adjacent metal layer. Finite element analysis (FEA) models are developed to predict actuator temperature distributions and quench times for varied actuation pulses. Additional models are developed to simulate actuator deflection including reflow of molten phase change material during an actuation pulse. The smallest fabricated device has a heater footprint of 3 µm × 1 µm, with a 20 nm air‐gap. The FEA model, which calculates the actuation voltage, energy, and ON–OFF current ratio for this device to be 1.1 V, 42 nJ, and 108, respectively, are experimentally verified. A PCNR scaled down to a 15 nm × 5 nm heater footprint with a 2 nm air‐gap is predicted to actuate at 400 mV and 1.7 pJ.