Nanofabrication of tailored surface structures in dielectrics using temporally shaped femtosecond-laser pulses.
Nanofabrication of tailored surface structures in dielectrics using temporally shaped femtosecond-laser pulses.
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DOI：
10.1021/am508925m
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发表时间：
2015-03
影响因子：
9.5
通讯作者：
J. Hernandez-Rueda;Nadine Götte;J. Siegel;M. Soccio;B. Zielinski;C. Sarpe;M. Wollenhaupt;T. Ezquerra;T. Baumert;J. Solís
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文献类型：
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作者：
J. Hernandez-Rueda;Nadine Götte;J. Siegel;M. Soccio;B. Zielinski;C. Sarpe;M. Wollenhaupt;T. Ezquerra;T. Baumert;J. Solís
我们已经研究了使用紧密聚焦，时间形状的飞秒（fs）激光脉冲在两种介电材料（蓝宝石和磷酸盐玻璃）中产生纳米结构，它们对脉冲激光辐射的响应具有不同的特性。为此，激光脉冲形状的三阶色散（TOD）被用来产生时间上不对称的激发脉冲，导致单步生产的亚波长烧蚀和亚烧蚀表面结构。当与以前的紧密聚焦的TOD形脉冲与熔融石英的相互作用的工作相比，我们在这里表明，这种方法导致非常不同的纳米结构形态，即，清洁的纳米孔没有碎片周围的蓝宝石和轮廓分明的纳米凸点和磷酸盐玻璃中的纳米火山口。虽然在蓝宝石中，无碎片处理与熔融石英相比熔体的粘度低得多有关，但磷酸盐玻璃中的纳米凸块形成是由低于烧蚀阈值的再固化时的材料网络膨胀（溶胀）引起的。纳米火山的形成是材料网络膨胀和消融的综合作用的结果，分别发生在照射区域的外围和中心部分。结果表明，诱导的形貌可以有效地控制调制的时间整形脉冲的TOD系数。
We have investigated the use of tightly focused, temporally shaped femtosecond (fs)-laser pulses for producing nanostructures in two dielectric materials (sapphire and phosphate glass) with different characteristics in their response to pulsed laser radiation. For this purpose, laser pulses shaped by third-order dispersion (TOD) were used to generate temporally asymmetric excitation pulses, leading to the single-step production of subwavelength ablative and subablative surface structures. When compared to previous works on the interaction of tightly focused TOD-shaped pulses with fused silica, we show here that this approach leads to very different nanostructure morphologies, namely, clean nanopits without debris surrounding the crater in sapphire and well-outlined nanobumps and nanovolcanoes in phosphate glass. Although in sapphire the debris-free processing is associated with the much lower viscosity of the melt compared to fused silica, nanobump formation in phosphate glass is caused by material network expansion (swelling) upon resolidification below the ablation threshold. The formation of nanovolcanoes is a consequence of the combined effect of material network expansion and ablation occurring in the periphery and central part of the irradiated region, respectively. It is shown that the induced morphologies can be efficiently controlled by modulating the TOD coefficient of the temporally shaped pulses.