Residual stresses and crystalline quality of heavily boron-doped diamond films analysed by micro-Raman spectroscopy and X-ray diffraction
Residual stresses and crystalline quality of heavily boron-doped diamond films analysed by micro-Raman spectroscopy and X-ray diffraction
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DOI：
10.1016/s0008-6223(03)00071-x
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发表时间：
2003-01-01
期刊：
影响因子：
10.9
通讯作者：
Trava-Airoldi, VJ
中科院分区：
文献类型：
--
作者：
Ferreira, NG;Abramof, E;Trava-Airoldi, VJ
X 射线衍射分析和显微拉曼光谱测量已用于不同硼掺杂水平的 HFCVD 金刚石薄膜的应力研究。薄膜中硼的掺入量在10(18)-10(21)硼/cm(3)范围内变化。从 SEM 图像获得的晶粒尺寸显示，晶粒平均尺寸为 2-4 微米，随着掺杂水平的增加，晶粒尺寸减小。随着掺杂水平从0（未掺杂薄膜）增加到10(21)硼/cm(3)，通过SEM横截面视图获得的薄膜的厚度从8Rut减小到5Rut。通过测量每个样品来确定总残余应力。 psi 值范围从 -60 度到 +60 度的 (331) 金刚石布拉格衍射峰，并应用 sin(2) psi 方法。对于显微拉曼光谱，对每个样品进行的光谱分析可以确定残余应力。随着掺杂水平的增加，钻石拉曼峰的变化以及钻石纯度从 99% 降低到 75%。从 X 射线和显微拉曼测量中获得的残余应力的类型和大小仅对于未掺杂的薄膜非常一致，而当掺杂水平增加时则不一致。我们将这种差异归因于每种技术的域大小特征。 (C) 2003 Elsevier Science Ltd. 保留所有权利。
X-ray diffraction analysis and micro-Raman spectroscopy measurements have been used for stress studies on HFCVD diamond films with different levels of boron doping. The boron incorporation in the film varied in the range 10(18)-10(21) boron/cm(3). The grain size, obtained from SEM images, showed grains with 2-4-mum average size, which decreases when the doping level increases. The thickness of the films obtained by SEM cross-section view decreased from 8 to 5 Rut as the doping level increased from 0 (undoped film) to 10(21) boron/cm(3). The total residual stress was determined by measuring, for each sample. the (331) diamond Bragg diffraction peak for psi-values ranging from -60degrees to +60degrees, and applying the sin(2) psi method. For the micro-Raman spectroscopy the spectral analysis performed on each sample allowed the determination of the residual stress. from the diamond Raman peak shifts, and also the diamond purity, which decreases from 99 to 75% as the doping level increases. The type and magnitude of the residual stress obtained from X-ray and micro-Raman measurements agreed well only for undoped film, disagreeing when the doping level increased. We attributed this discrepancy to the domain size characteristic of each technique. (C) 2003 Elsevier Science Ltd. All rights reserved.