Miniaturized flexible temperature sensor

Miniaturized flexible temperature sensor
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DOI:
10.1109/jmems.2007.908437
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发表时间:
2007-12-01
影响因子:
2.7
通讯作者:
Gijs, Maitin A. M.
Gijs, Maitin A. M.
中科院分区:
工程技术3区
文献类型:
--
作者:
Moser, Yves;Gijs, Maitin A. M.

文献摘要

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我们实现了一种基于微图纹薄膜铂电阻的柔性温度传感器。该传感器位于一个100亩宽、7厘米长的探头的末端。后者由生物相容性耐高温聚酰亚胺(u -清漆- s, UBE Industries, Tokyo, Japan)组成,其中嵌入了铂电阻和电接触引线。该传感器工作范围从0摄氏度到400摄氏度,时间常数小于80毫秒。这种传感器可以潜在地用于表征肿瘤的热消融过程,通过微管使用热蒸汽注入。
We realize a flexible temperature sensor based on a micropatterned thin-film platinum resistor. The sensor is situated at the end of a 100-mu m-wide and 7-cm-long probe. The latter consists of a biocompatible high-temperature-resistant polyimide (U-Varnish-S, UBE Industries, Tokyo, Japan) in which the platinum resistor and the electrical contact leads are embedded. The sensor is operational from 0 degrees C up to 400 degrees C and has a time constant of less than 80 ms. Such a sensor can potentially be used to characterize the thermo-ablation process of tumors using hot steam injection via a microtube.