Abrasive Jet Polishing Approaches to the Manufacture of Micro-optics with Complex Shapes
Abrasive Jet Polishing Approaches to the Manufacture of Micro-optics with Complex Shapes
复制标题
用于制造复杂形状微光学器件的磨料射流抛光方法
DOI：
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发表时间：
2012
期刊：
影响因子：
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通讯作者：
O. Faehnle
中科院分区：
文献类型：
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作者：
O. Faehnle
讨论了抛光微球的要求，确定磨料浆射流技术作为可能的解决方案，具有亚毫米足迹。介绍了它们在去除亚毫米结构和产生微非球面方面的应用。
Requirements for polishing of micro-aspheres are discussed identifying abrasive slurry jet techniques as possible solution featuring submillimeter footprints. Their application to the removal of sub-millimeter structures and the generation of micro-aspheres are presented.