In situ observation of self-organizing nanodot formation under nanosecond-pulsed laser irradiation on Si surface
In situ observation of self-organizing nanodot formation under nanosecond-pulsed laser irradiation on Si surface
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DOI：
10.1063/1.3512888
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发表时间：
2010-11-15
影响因子：
3.2
通讯作者：
Kato, T.
中科院分区：
文献类型：
--
作者：
Watanabe, S.;Yoshida, Y.;Kato, T.
使用配备脉冲激光的高压电子显微镜（laser-HVEM）对激光辐照诱导的纳米点阵列在Si表面上的形成进行原位观察。在多次纳秒脉冲激光照射下，原子团簇首先在表面形成并分布，外延生长成直径小于10 nm的突起点，然后通过连续激光照射诱导原子团簇扩散，原子团簇相互蚕食并合并成具有排列整齐的更大点的涟漪线。我们的结论是，目前的亚波长的二维有序纳米点阵列是在脉冲激光照射下形成的自组织。(C)2010年美国物理学会。[doi：10.1063/1.3512888]
An in situ observation of the formation of a laser-irradiation-induced nanodot array on a Si surface was performed using a pulsed-laser-equipped high-voltage electron microscope (laser-HVEM). Under multiple nanosecond (ns) pulsed laser irradiation shots, atomic clusters were first formed and distributed on the surface in order to grow them epitaxially into protruded dots with diameters of ten nanometers or less. This is followed by their diffusion induced by successive laser shots to cannibalize and merge them into a ripple line with aligned, larger dots. We conclude that the present subwavelength two-dimensionally-ordered nanodot array is formed by self-organization under pulsed laser irradiation. (C) 2010 American Institute of Physics. [doi:10.1063/1.3512888]